一個元件的接墊結構，和一分錢的硬幣擺在一起以顯示大小。（圖片由喬治亞州低成本電子封裝研究技術中心授權；由Stanley F. Leary拍攝。由國家科學基金圖片圖書館.)提供。） A device pad structure, shown with a penny for scale. (Image courtesy of Georgia Tech Center for Low Cost Electronics Packaging Research; photo by Stanley F. Leary. Image provided by the National Science Foundation Image Library.)
課程重點
本課程網頁的特點是有詳細的課堂幻燈片，以及課程中學生使用的其他材料。 This course site features detailed lecture slides, along with other materials used by students in the course.
課程描述
本課程介紹了微米／ 奈米製程的理論和技術。課堂講授和實驗課重點介紹了基本製程技術，如擴散、氧化、光刻、化學氣相沉積等。通過小組實驗作業，學生應該會對這些製程技術和它們在元件製造中的協同應用有了一定理解。修讀這門課程的學生有獨一無二的機會使用現代方法和技術，來製作和測試微米／奈米元件。 This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.
師資
講師：
Martin Schmidt 教授
Robert O'Handley 博士
Susan Ruff
