X射線譜的原理

• 電子與樣品的相互作用
  • 彈性散射: 電子背散射
  • 非彈性散射: 二次電子激發
    • 連續X射線的產生，特徵X射線的產生
      
      
  • 相互作用體積
    
    
• 基體效應的修正
  • 原子序數，吸收和特徵熒光修正
  • 連續熒光修正
  • Φ(ρz) 修正

儀器設備

• 電子探針分析中使用的探測器
  • 電子探測器︰Everhart-Thornley 和固體二極體探測器
  • 陰極射線磷光探測器
  • X射線探測器︰能量色散型譜儀和波長色散型譜儀

成像技術

• 拓撲學圖像
• 波長色散譜的成分像
• 陰極射線磷光成像

定量分析

• 波長和能量色散技術
• 背景和峰重疊的修正
• 輕元素分析

Goldstein, J. I., D. E. Newbury, P. Echlin, D. C. Joy, A. D. Jr. Romig, C. E. Lyman, C. Fiori, and E. Lifshin. 《掃描電子顯微鏡和X-射線顯微分析︰生物學家，材料學家和地質學家的教科書》(Scanning Electron Microscopy and X-ray Microanalysis: A Text for Biologists, Material Scientists, and Geologists)（第二版）　New York: Plenum Press, 1992.

Reed, S. J. B.　《地質學中的電子探針微量分析和掃描電子顯微鏡方法》(Electron Microprobe Analysis and Scanning Electron Microscopy in Geology)　Cambridge, UK: Cambridge Univ. Press, 1996.

Scott, V. D., G. Love, and S. J. B. Reed.　《定量電子探針微量分析》(Quantitative Electron-Probe Microanalysis)（第二版）　New York: Ellis-Horwood, 1995.

Theory of X-ray Spectrometry

• Electron-specimen Interactions
  • Elastic Scattering: Electron Backscattering
  • Inelastic Scattering: Secondary Electron Excitation
    • Continuum X-ray Generation, Characteristic X-ray Generation
      
      
  • Interaction Volume
    
    
• Matrix Corrections
  • Atomic Number, Absorption and Characteristic Fluorescence Corrections
  • Continuum Fluorescence Correction
  • Φ(ρz) Corrections

Instrumentation

• Detectors Used in Electron Microprobe Analysis
  • Electron Detectors: Everhart-Thornley and Solid-state Diode Detectors
  • Cathodolumenescence Detectors
  • X-ray Detectors: Energy Dispersive and Wavelength Dispersive Spectrometers

Imaging Techniques

• Topographic Imaging
• Compositional Imaging with Wavelength Dispersive Spectrometry
• Cathodolumenescence Imaging

Quantitative Analysis

• Wavelength and Energy Dispersive Techniques
• Background and Peak Overlap Corrections
• Light Element Analysis

Goldstein, J. I., D. E. Newbury, P. Echlin, D. C. Joy, A. D. Jr. Romig, C. E. Lyman, C. Fiori, and E. Lifshin. Scanning Electron Microscopy and X-ray Microanalysis: A Text for Biologists, Material Scientists, and Geologists (Second Edition). New York: Plenum Press, 1992.

Reed, S. J. B. Electron Microprobe Analysis and Scanning Electron Microscopy in Geology. Cambridge, UK: Cambridge Univ. Press, 1996.

Scott, V. D., G. Love, and S. J. B. Reed. Quantitative Electron-Probe Microanalysis (Second Edition). New York: Ellis-Horwood, 1995.