推荐
Recommended

Plummer, J., M. Deal, P. Griffin. 《硅超大规模集成电路技术》. Prentice Hall, 2000.
Plummer, J., M. Deal, P. Griffin. Silicon VLSI Technology. Prentice Hall, 2000.

附加参考书目
Additional References

Campbell, S. A. 《微电子制造的科学和工程》. Oxford University Press, 1996.
Campbell, S. A. The Science and Engineering of Microelectronics Fabrication. Oxford University Press, 1996.

Wolf, S.和R. Tauber.《超大规模集成电路时代的硅处理》. Lattice Press, 1986.
Wolf, S., and R. Tauber. Silicon Processing for the VLSI Era. Lattice Press, 1986.

Sze, S. M. 《超大规模集成电路技术》. McGraw-Hill, 1983.
Sze, S. M. VLSI Technology. McGraw-Hill, 1983.

Ghandi, S. K.《超大规模集成电路制造原理》. Wiley, 1983.
Ghandi, S. K. VLSI Fabrication Principles. Wiley, 1983.

Pierret／Neudeck.《固态器件的模系列》. Addison-Wesley, 1984.
Pierret/Neudeck. Modular Series on Solid State Devices. Addison-Wesley, 1984.

Grove.《半导体器件的物理学和技术》. Wiley, 1977.
Grove. Physics and Technology of Semiconductor Devices. Wiley, 1977.

Colclasser. 《微电子处理和器件设计》. Wiley, 1980.
Colclasser. Microelectronics Processing and Device Design. Wiley, 1980.

Vossen, J. L.和W. Kern. 《薄膜处理》. Academic Press, 1978.
Vossen, J. L., and W. Kern. Thin Film Processes. Academic Press, 1978.

Mayer, J. W.和S. S. Lau.《电子材料科学：Si和GaAs中的集成电路》. Macmillan, 1990.
Mayer, J. W., and S. S. Lau. Electronic Materials Science: For Integrated Circuits in Si and GaAs. Macmillan, 1990.

Murarka, S.和M. Peckerar.《电子材料科学和技术》. Academic, 1989.
Murarka, S., and M. Peckerar. Electronic Materials Science and Technology. Academic, 1989.

Ohring, M. 《薄膜的材料科学》. Academic Press, 1992.
Ohring, M. The Materials Science of Thin Films. Academic Press, 1992.

Senturia, S.《微系统设计》. Kluwer, 2001.
Senturia, S. Microsystem Design. Kluwer, 2001.

Madou, M. 《微制造原理》. CRC Press, 2002.
Madou, M. Fundamentals of Microfabrication. CRC Press, 2002.

Kovacs, G. T. A. 《微机械传感器资料集》. McGraw-Hill, 1998.
Kovacs, G. T. A. Micromachined Transducers Sourcebook. McGraw-Hill, 1998.

Maluf, N. 《微机电系统工程概论》. Artech, 2000.
Maluf, N. An Introduction to Microelectromechanical Systems Engineering. Artech, 2000.


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Other Resources

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Intel's 90 nm Technology: Moore's Law and More, by Mark Boh

《不是永恒的幂指数》，Gordon Moore著
No Exponential is Forever, by Gordon Moore