一个器件的引线口结构，为了表明大小和一个美分的硬币一起展示。（图片由乔治亚州低成本电子封装研究技术中心授权；由Stanley F. Leary拍摄。由国家科学基金图片图书馆提供。）
A device pad structure, shown with a penny for scale. (Image courtesy of Georgia Tech Center for Low Cost Electronics Packaging Research; photo by Stanley F. Leary. Image provided by the National Science Foundation Image Library.)
This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.
师资
讲师：
Martin Schmidt 教授
Robert O'Handley 博士
Susan Ruff
