| 1 |
纵览／安全性／实验任务(MAS)
Overview/Safety/Lab Assignment (MAS) |
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| 2 |
IC实验：总览(MAS)
IC Lab: Overview (MAS)
主修课程中信息集约课程的介绍(本科院系的要求)（十分钟） (SR)
Introduction to Communication Intensive subject in the Major (undergraduate institute requirement) (10 minutes) (SR) |
布置问题集 1
Problem Set 1 Out |
| 3 |
真空系统 (RCOH)
Vacuum System (RCOH) |
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| 4 |
化学气相沉积（CVD） (RCOH)
CVD (RCOH) |
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| 5 |
氧化 (RCOH)
Oxidation (RCOH) |
上交问题集 1
Problem Set 1 Due
布置问题集 2
Problem Set 2 Out
布置实验1报告
Lab 1 Report Out |
| 6 |
集成电路（IC）实验：测试 (MAS)
IC Lab: Testing (MAS)
撰写技术报告(SR) (PDF)
由Thea Singer提供
Writing Technical Reports (30 minutes) (SR) |
上交问题集2
Problem Set 2 Due |
| 7 |
扩散 (RCOH)
Diffusion (RCOH) |
布置问题集3
Problem Set 3 Out |
| 8 |
扩散／注入 (RCOH)
Diffusion/Implantation (RCOH) |
上交实验1报告(在第8节课结束后两天)
Lab 1 Report Due (2 days after Lec 8) |
| 9 |
微机电系统（MEMS）实验：总览 (MAS)
MEMS Lab: Overview (MAS) |
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| 10 |
光刻 (MAS)
Lithography (MAS) |
上交问题集3
Problem Set 3 Due
布置问题集4
Problem Set 4 Out |
| 11 |
光刻，软光刻 (MAS)
Lithography, Soft Lithography (MAS) |
上交问题集4
Problem Set 4 Due |
| 12 |
微机电系统（MEMS）实验：测试 (MAS)
MEMS Lab: Testing (MAS) |
布置实验2报告
Lab 2 Report Out |
| 13 |
测验1 (包括光刻中的课题) (教师)
Quiz#1 (includes topics through Lithography) (Staff) |
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| 14 |
刻蚀 (湿法) (MAS)
Etching (wet) (MAS)
微机电系统（MEMS）报告指导(SR)
Guidance for MEMS Report (15 minutes) (SR) |
布置问题集5
Problem Set 5 Out |
| 15 |
刻蚀 (干法) (MAS)
Etching (dry) (MAS) |
上交实验2报告
Lab 2 Report Due |
| 16 |
流体学实验：总览 (MAS)
Fluids Lab: Overview (MAS) |
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| 17 |
溅射 (RCOH)
Sputtering (RCOH) |
上交问题集5
Problem Set 5 Due
布置课后测验
Take Home Quiz Out |
| 18 |
蒸发 (RCOH)
Evaporation (RCOH)
对微机电系统（MEMS）报告的反馈 (SR)
Feedback on MEMS Report (15 minutes) (SR) |
上交家庭测验
Take Home Quiz Due
布置问题集6
Problem Set 6 Out |
| 19 |
互连 (RCOH)
Interconnect (RCOH) |
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| 20 |
先进的硅器件 (MAS)
Advanced Si Devices (MAS) |
再次提交实验2报告(在第20节课结束后两天)
Lab 2 Report Resubmissions Due (2 days after Lec 20) |
| 21 |
晶体生长 (RCOH)
Crystal Growth (RCOH) |
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| 22 |
可靠性 (RCOH)
Reliability (RCOH) |
上交问题集6
Problem Set 6 Due |
| 23 |
流体学实验：测试 (MAS)
Fluids Lab: Testing (MAS) |
布置实验3报告
Lab 3 Report Out |
| 24 |
测验2 (包括的内容从软光刻到可靠性) (教师)
Quiz#2 (includes topics from Soft Lithography through Reliability) (Staff) |
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| 25 |
专题：纳米生物学
Special topic: Nanobio |
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| 26 |
专题：纳米生物学 (客座嘉宾) 纳米光刻 (RCOH)
Special topic: Nanobio (Guest) Nanolithography (RCOH) |
上交实验3报告
Lab 3 Report Due |
